2011 Nikon NSR-TFHi14DL Stepper

WAFER SIZE 200mm

HARD DISK SSD

MCSV BASIC V3.46F

OCS OPTION G3.45Q

 MAIN SYSTEM WINXP X64 / VMS7.2.1

PC TYPE NEST-A

DISK DRIVE SSD

ILLUMINATION UV- LAMP

5:1 NA 0.3-0.45 Variable, 0.5µm

WAFER STAGE TYPE Air Bearing

FIELD SIZE

WAFER ALIGNMENT FIA / LSA

AUTO FOCUS YES

WAFER LOADER WL3

Non Contact Pre-aligner

Notched

CONTROL RACK POSITION RHS

RETICLE LOADER extended reticle libraray

PPD NO

BARCODE READER YES CODE 39

CHAMBER TEMP 20.5

CHAMBER TYPE Standard

LENS DATA AVAILABLE YES