1996 AMAT P5000

CHAMBER A  x  Universal CVD Teos

CHAMBER B  x   Universal CVD Teos

CHAMBER D x  Universal CVD Teos

Tool is sold with three chambers and was used in cleanroom until August 2023

Wafer Size Range   Minimum 150 mm  Maximum 150 mm  Set Size 150 mm

Number of Chambers 3

Year of Manufacture 1996

Condition Very Good