Semitool 4300 S

Type: Spin Rinse Dryer

Wafer Size: 12"

Equipment Configuration: - Single stack

- 101 Controllers, Digital

- Polypropylene cabinet

- Brushless motor

- New Teflon DI and N2 lines

- New color-coded pneumatic tubing

- Bowls to be electropolished

- Labyrinth Seal design

- 110V ready system

- QD rotor design

Includes:

- DI resistivity

- Static-eliminator

- Water recirculation

Particle specification:

- <25 particles @ .25um / 200mm wafer