1987 TENCOR Surfscan 4500 Particle Detection Tool

• Cassette to Cassette Handling of 3” - 6” Wafers
• 0.2 micron Particle Size Sensitivity
• New HeNe Laser & Power Supply
• New 4” Calibrarion Wafer Included
• Automatic Calibration
• System Calibrated & Demonstrated Before Delivery
• Flatscreen Monitor
• Calibration Standard Wafer Included

Description Wafer Surface Analysis

Accessories New 4" (dia.) Surface Contamination Standard - User Specified Particle Diameter

Condition Excellent

Year of Manufacture 1987

Refurbished YES

Power Requirements 120 V   1 Phase