1994 ATV Technologie GmbH PEO 602

This furnace can handle wafers up to 150mm

Configuration:

N2 - 1500 l/min

N2 -  660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

Number of Furnace Tubes 1

CE Marked YES

Year of Manufacture 1994

Condition Good