2001 Canon I5500iZ

- hardware changes in reticle loading sub-system

- hardware changes in wafer loading sub-system

- hardware changes in operation-console sub-system

- saved all machine-related software components to a MO disk

- harddisk removed from equipments computer workstation

Estimated Move Out Date: 01.04.24

Appearance: good  // Function: need to repair

Wafer Size Range   Minimum 300 mm  Maximum 300 mm

Other Information Missing Parts:

1) no Stepper Computer Workstation harddisk installed

2) No Hg-lamp installed

3) No UPS unit installed.

4) 1x Reticle SMIF pod indexer missing

EOL: all optical parts, exposure shutter unit, main shutter unit, wafer robot system, reticle robot system

Condition Good

Year of Manufacture 2001

Exterior Dimensions   Width 90.551  in  (230.0 cm)  Depth 133.858  in  (340.0 cm)  

Height 102.362  in  (260.0 cm)

Weight 25,132  lb  (11,400 kg)