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LAM 2600 e6 Flex FXP to HXE Upgrade Kit

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Description

  • Model Name: 2600 e6 Flex FXP to HXE Upgrade Kit
  • Wafer Size: 300
  • Configuration: Upgrade Kit to FLEX HXE - OX Pillar Etch
  • Group: Electronic
  • Category: Semiconductor Fabrication
  • Family: Etch Equipment
  • Type: Plasma Etch System
  • Manufacturer: Lam Research
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Specifications

ManufacturerLAM
Model2600 e6 Flex FXP to HXE Upgrade Kit
ConditionUsed
Stock NumberBM3198