LAM Altus Max
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Description
- Wafer Size: 300
- Configuration: Low Resistance Tungsten CVD
- Group: Electronic
- Category: Semiconductor Fabrication
- Family: Deposition Equipment
- Type: Multi-Process CVD
- Manufacturer: Lam Research
Specifications
| Manufacturer | LAM |
| Model | Altus Max |
| Condition | Used |
| Stock Number | BM3200 |