Hitachi CG4000

Status of Equipment: Installed 

Configuration:

553-9015 CG4000 3PORT

569-6874 Dry pumps I/F unit "F" 15m 554-0745 Loadport

553-9223 New Edge Roughness Measurement

553-9224 Defect Review I/F (All)

553-9225 Flat scan function

553-9226 GCC function

567-9573 DS/T-PC link connection license

569-7918 P I/O sensor

569-7094 MPPC Measurement function

569-0462 Line width roughness analysis function

553-0064 Modification of wafer holder

SQ512221 Loadport specification

SQ512222 Mini environment specification

553-9815 GEM300

SQ512232 ARAMS/EPT

SQ512241 Signal light tower

553-9267 100nm Standard Microscale (PC)

569-7098 Lowest Vacc 200V modification

569-9626 Offline Recipe V3 Applying Function