AMAT Centura EMXP plus Oxide

Everything is in Refurbished condition except the gas box component(MFC,valve.etc)

and used 2nd source parts for the Frame..chamber housing....

AMAT Centura 1 phase2 Oxide 3chamber system

E-MXP plus oxide 6inch chamber

6 inch robot and orient chamber

Wide body load lock

VME 1 gas panel (3Chamber)