2008 NIKON NSR-S208D

Nikon, NSR-S208D, 300mm

Tool Status Connected

Wafer Size 300 mm

Fab Section Lithography 

Asset Description NIKON Main Body

Software Version MCSW ver.180-P12/OCSW ver.180- P10

CIM SECS

Process kRF

Main System Main Body 1

Handler System External Foup System 1

Air Conditioner 1

Gigaphoton laser(GP Laser) 1

Amp Rack 1

Temperature Controller 1