1995 AMAT Endura Ni-V / Ti Mo / AlSi / AgAu
1995 AMAT Endura Ni-V / Ti Mo / AlSi / AgAu
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Description
Wafer size: 150mm
CassetteLoad-Lock NarrowBody
PVDProcessChamber1NiV
PVDProcessChamber2TiPVD
ProcessChamber3MoPVD
ProcessChamber4AlSiPVD
ProcessChamberDAgAu
ChamberE,FOrienter/Degas(WithoutTemp.Monitor)
ChamberBCoolDow
Specifications
| Manufacturer | AMAT |
| Model | Endura Ni-V / Ti Mo / AlSi / AgAu |
| Year | 1995 |
| Condition | Used |
| Stock Number | BM3267 |