1995 AMAT Endura Ni-V / Ti Mo / AlSi / AgAu

1995 AMAT Endura Ni-V / Ti Mo / AlSi / AgAu

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Description

Wafer size: 150mm

CassetteLoad-Lock NarrowBody

PVDProcessChamber1NiV

PVDProcessChamber2TiPVD

ProcessChamber3MoPVD

ProcessChamber4AlSiPVD

ProcessChamberDAgAu

ChamberE,FOrienter/Degas(WithoutTemp.Monitor)

ChamberBCoolDow


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Specifications

ManufacturerAMAT
ModelEndura Ni-V / Ti Mo / AlSi / AgAu
Year1995
ConditionUsed
Stock NumberBM3267