1998 Hitachi S8840
1998 Hitachi S8840
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Description
Tool Status Connected
Wafer Size 200 mm
Fab Section Etch
General Product Information
Vendor Supplier HITACHI
Model S8840
Vintage 1998
Asset Description CD SEM-HITACHI, S-8840
Software Version NA
CIM SECS
Process CD Measument
Specifications
Manufacturer | Hitachi |
Model | S8840 |
Year | 1998 |
Condition | Used |
Stock Number | BM3273 |