2012 Mattson MILLIOS HVM

Tool Status Connected

Wafer Size 300 mm

Fab Section Diffusion

Software Version 1.22.1.6C

CIM E84, SECS/GEM, GEM300, Interface A

Process ms-ANNEAL

Handler System Standard Automation / Software 1

Factory Interface FOUP 2

Options System 10ms Long Pulse Capability 1

Options System Interface A 1

Options System Software Emulator 1