2016 Oxford Instruments Opal

2016 Oxford Instruments Opal

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Description

Tool Status Connected

Wafer Size NA

Fab Section Lab


Asset Description RF/Plasma oxide deposition tool

Software Version PC2000 2.50.124.0

CIM N/A

Process ALD AlOx deposition

Handler System None

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Specifications

ManufacturerOxford Instruments
ModelOpal
Year2016
ConditionUsed
Stock NumberBM3282