2016 Oxford Instruments Opal
2016 Oxford Instruments Opal
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Description
Tool Status Connected
Wafer Size NA
Fab Section Lab
Asset Description RF/Plasma oxide deposition tool
Software Version PC2000 2.50.124.0
CIM N/A
Process ALD AlOx deposition
Handler System None
Specifications
| Manufacturer | Oxford Instruments |
| Model | Opal |
| Year | 2016 |
| Condition | Used |
| Stock Number | BM3282 |