2012 TEL Lithius Pro i

Tool Status Connected

Wafer Size 300 mm

Fab Section Lithography

Asset Description Coater/Develeoper Tool

Software Version 100.0.90.2

CIM SECS, GEM

Process ArF Immersion / Dry

Handler System PRA/CRA/IRAI/PRAI 7

Factory Interface FOUP 5

RESIST CABINET 1

Chiller Original 1

A/C POWER BOX 1

DEV. CABINET 1

COT CABINET 1

T/H CONTR. 1