2007 Rudolph AXI-940a
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Description
Model: Rudolph AXI-940a (2007 vintage )
Mainbody with Objectives and Illumination sources.
E25 B20 wafer edge & Backside installation module.
12” wafer configuration.
EFEM : Yaskawa CU-RC400M-D03 with aligner XU-ACP130-B11, and controller NXC100.
2x Loadports
PC availabe - no HDDs
Specifications
| Manufacturer | Rudolph |
| Model | AXI-940a |
| Year | 2007 |
| Condition | Used |
| Stock Number | BM3306 |