2000 AMAT P5000

CHAMBER A  Universal CVD Teos

CHAMBER B  Universal CVD Teos

CHAMBER C Mark2 Etch

CHAMBER D Mark2 Etch

The Tool is sold with 4 chambers and was productiv until August 2023

Wafer Size Range   Minimum 150 mm  Maximum 150 mm  Set Size 150 mm

Number of Chambers 4

Year of Manufacture 2000

Condition Very Good