AMAT Precision 5000

AMAT P5000, equipped with an 8-inch CVD Chamber and DXZ Chamber, a matching network, a VME rack, 8-inch Robot, Lamp module and Lamp driver, electrical and RF rack equipped with an ENI OEM12B RF generator.

The DXZ Chamber is shell body and not complete.

- VME rack

- 8 inch Robot

- Electrical and RF Rack with one ENI OEM12B RF generator.