1994 LAM Rainbow 4428

Description

ISO Etch

Wafer Size 200 mm

LAM 4420 ETCHER

Software Version Envision1.5-Release

CIM SECS

Process CMOS

Main System LAM 4420 ETCHER 1

Handler System Harmonics Arm 2

Factory Interface SMIF 2

LL Pump 1

TCU 2080 1

AC Rack 1

PC Pump 1