1993 LAM Rainbow 4420

MFG Date: 1993

Last PM: 11/11/2016

System software (App): Envision ver1.5.1. NOT classic software. 

Condition:  Good Condition

Quantity: 1 set

Wafer Size: 8-inch

Vacuum Pump: Not included. No warranty

Chiller and RF: Included. No warranty

Description and Key Features:

Currently configured for 200mm wafer sizes MFG Date: 1993

Last PM: 11/11/2016

Install Type: Thru-the-wall (TTW)

Status Lamp

System software (App): Envision ver1.5.1

SECS I Interface

Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC)

Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C

RF Match Type: LAM

On-board RF Generators: No

RF Generator: ENI OEM-650A

RF Hours: 402056

Remote RF Cart: No

ATM Passivation Module: No

Plasma LLK (PLL): No

High Conductance Manifold: No

Gas Box:

Remote gas Box: No

Orbitally welded GB: Yes

Backside cooling MFC: Unit 1250A

Gases:

#1: N2, 200 sccm, Unit 1200A

#2: CHF3, 50 sccm, Unit 1200A

#3: N2, 300 sccm, Aera

#4: N2, 500 sccm, Unit UFC 1660

#5: CF4, 150 sccm, Unit 1200A

#6: SF6, 150 sccm, Unit 1200A

#7: He, 1 slm, Unit UFC 1660

#8: O2, 200 sccm, Unit UFC 1660

Pumps:

Heated pumping manifolds: No

Pump controller: iQ Series Entrance /: No

Exit: Edwards iQDP-40: No

Main: Edwards iQDP-80: No

Chiller(s): (2) SMC HRS018-WN-20-M: No

On-board AC Distribution type: Fused

Power requirements: 208VAC, 3-Phase, 5-Wire