TEL Act12 Single Block Stand Alone

Manufacturer: Tokyo Electron

➢ Tool Type: Slam stand-alone Track

➢ Model: ACT 12

➢ Wafer Size: 300 mm

➢ Direction: LEFT HAND SIDE

➢ Slam Stand Alone Track

➢ 2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process

➢ 3 FOUP Loader Port

➢ SECS/GEM I/II Interface required is iUSC

➢ 2 SOG Coater Process Station

 2 SOG Nozzles w/ Temperature Control

 4 Solvent Capability

 TARC Compatible: Teflon Coated Chamber

 PTI Mass Flow Exhaust Controller

 Temperature Humidity Control

 1 Set of SS Back Rinse and Cup Rinse Nozzles

➢ 4 Chill Plate Process Station

➢ 1 Transfer Chill Plate Process Station

➢ 3 Transfer Low Temperature Hot Plate (LHP)

➢ 6 High Temp Hot Plate Process Stations (HHP)

➢ 1 TEL Temperature and Humidity Controller

➢ Side Chemical Cabinet

 8 – 2.5 L Bottle Storage Capacity

 4 – 2.5 L Bottle Storage Capacity

 4 – 12 L Tank Solvent Canisters

➢ 1 AC Power Box