KLA TENCOR SFS 6420

KLA TENCOR SFS 6420

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Description

As Is

Complete

The following parts are replaced.

Replaced Scan Lead Screwer

Replaced Focus Assembly

Replaced three PCBs:  FRU KIT, 4-CHAN MTR DRV PCB,  PCB ASSY, TSTD, 4CHNL MTR,  PCB ASSY, TSTD, MOTOR DISTRIB

Replaced Laser

Replaced CBL ASSY, Laser on DET, FLD

Replaced index motor and cable

Specifications

ManufacturerKLA TENCOR
ModelSFS 6420
ConditionUsed
Stock NumberBM3329