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2000 AMAT P5000

2000 AMAT P5000

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Description

Wafer Size Range

Minimum

150 mm

Maximum

150 mm

Set Size

150 mm

Number of Chambers

4

Year of Manufacture

2000

Condition

Very Good


CHAMBER A

Universal CVD

Teos

CHAMBER B

Universal CVD

Teos

CHAMBER C

Mark2

Etch

CHAMBER D

Mark2

Etch

The Tool is sold with 4 chambers and was productiv until August 2023

Specifications

ManufacturerAMAT
ModelP5000
Year2000
ConditionUsed
Stock NumberBM3373