2000 AMAT P5000

Wafer Size Range

Minimum

150 mm

Maximum

150 mm

Set Size

150 mm

Number of Chambers

4

Year of Manufacture

2000

Condition

Very Good

CHAMBER A

Universal CVD

Teos

CHAMBER B

Universal CVD

Teos

CHAMBER C

Mark2

Etch

CHAMBER D

Mark2

Etch

The Tool is sold with 4 chambers and was productiv until August 2023