1996 AMAT P5000
1996 AMAT P5000
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Description
Wafer Size Range
Minimum
150 mm
Maximum
150 mm
Set Size
150 mm
Number of Chambers
3
Year of Manufacture
1996
Condition
Very Good
CHAMBER A
x
Universal CVD
Teos
CHAMBER B
x
Universal CVD
Teos
CHAMBER D
x
Universal CVD
Teos
Tool is sold with three chambers and was used in cleanroom until August 2023
Specifications
| Manufacturer | AMAT |
| Model | P5000 |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM3374 |