2012 Mechatronic mWS200/300t

Mechatronic Sorter for 200 and 300mm

With bernoulli Aligner for 8 and 12 inch and IOSS Camera.

And greenlight inspection.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.

Wafer Size Range

Minimum

200 mm

Maximum

300 mm

Set Size

300 mm

Cassette to Cassette

YES

Other Information

Tool was in production until 19 october 2021

Condition

Excellent

Year of Manufacture

2012

CE Marked

YES