2006 Rudolph MP200

Description

MP200 double path tool

non copper tool; double path tool delay stage; 6 inch chuck

Cooling Water Required Minimum Flow: 0.79 GPM (3.00 l/m)    Minimum Temperature: 12 ºC (54 ºF, 285.00 ºK)    Maximum Temperature: 20 ºC (68 ºF, 293 ºK)

Operating Air Pressure 14.00 PSI (96,534.20 N/sq m)

Vacuum Required 0.98 in Hg (24.89 mm Hg)

Contactless metal thickness measurement

Wafer Size Range

Minimum

150 mm

Maximum

200 mm

Multi-Layer Film Capacity

YES

Micro Spot Optics

YES

Wafer Mapping

YES

Controller Type

PC Controller Type

External Cooling

Water Cooled

Cooling Water Required

Minimum Flow: 0.79 GPM (3.00 l/m) Minimum Temperature: 12 ºC (54 ºF, 285.00 ºK) Maximum Temperature: 20 ºC (68 ºF, 293 ºK)

Operating Air Pressure

14.00 PSI (96,534.20 N/sq m)

Vacuum Required

0.98 in Hg (24.89 mm Hg)

Condition

Good

Year of Manufacture

2006