2010 Karl Suss MA 100e/150e

1 pc. Mask Aligner SussMicrotec MA100e/150e SN: 1035 (refurbished), Base machine built in 2010 

                                 TSA (Top Side Alignment)

           The machine is a fully automatic cassette-to-cassette machine with pre-alignment.

                    - Remanufactured according to Suss Standard 2024 -

                      for Proximity-Contact, Soft-Contact, Hard-Contact

Pos.     Qty       Description                                                                                                                                 .

1             1             SUSS MASK ALIGNER MA150e Windows 10 based with  Suss AL /Autoalign System   

2            1            Alignment System MA150e TSA

3            1            PC -Aut. Adjustment (Autoalignment System) Cognex 8100 ( Patmex ) TSA

4             1             Lamphouse unit LH 1000 with HP and 1000W  Hg-Lamp,

                              Intensity >25 mW/cm², Wavelength: 365 nm (I-line filter)

5             1             Suss DVM 6 dual video Microscope (2CCD–Cameras /set of rotating Objectives L+R)

6             2             Objective  5x

7             2             Objective  10x

8             2             Objective  20X

9             1             Transport Plates Kit MA150 / W100-150/Even

10           1             Exposure Chuck Prox/Cont W100

11           1             Mask holder MA 150/TL/Prox/Cont/W100 4” Chuck and 5” x 5” Mask holder

12           1             CIC1200 Lamp Power supply

13           1             Set of Exposure optics Typ A / UV400   350-450 nm ( g-, h-, i-line )

14           1             Non Contact Prealigner Station with IR – Sensor

15           1             Operators Manual MA 150e English (Digi.)

Set 6” Chuck and 7” x 7” Mask Holder comes as additional part to this machine and is in the sales price included.