1998 TEL Mark8

SOG Coater.

Tool status: connected

Wafer size: 200mm

Fab section: thin film

Vintage: 1998

Asset description: TEL Mark 8 SOG coater

Software version: MK8Z2.40

CIM: SECS

Process: spin on glass CMOS

Main system: SOGCT-04 - 1

Handler system: carrier and main arm - 1

Factory interface: SMIF - 1

Options system: TH controller - 1

Options system: EBR supply cabinet - 1

Others: alarm interlock system - 1

Transformer 1