1996 TEL TE8500
1996 TEL TE8500
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Description
Contact Etch
Tool Status Running Wafers
Wafer Size 200 mm
Fab Section Etch
Asset Description TEL 8500 OXIDE ETCHER
Software Version VER 1.0
CIM SECS
Process CMOS
Main System TOOL 1
Factory Interface SMIF 2
DRY PUMP 3
RF RACK 1
CHILLER 1
AC RACK 1
Specifications
| Manufacturer | TEL |
| Model | TE8500 |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM3427 |