2010 Ultratech LSA100A

Model LSA100A

Description Laser Spike Anneal

Year of Manufacture 2010

Tool Status Connected

Wafer Size 300 mm

Fab Section Diffusion

Asset Description LSA100A

Software Version LSA 05.09 Build 05

CIM SECS, GEM

Process Laser Spike Anneal

Main System Remote Rack 1

Main System EFEM 1

Main System Chamber 1

Factory Interface FOUP 2 

Heat Exchanger 1