2010 Zeiss Merlin

Manufacturer Zeiss

Model Merlin

Year of Manufacture 2010

Tool Status Connected

Wafer Size NA

Fab Section Failure Analysis

Asset Description Zeiss Merlin Scanning Electron Microscope

Software Version Windows 7 

Main System Zeiss Merlin SEM

Operating System: Windows XP Pro

BSD STEM

Load Lock 2

Motorized Stage

Smart SEM Version 5.07

Oxford EDX 50mm Sq detector

XEI Plasma Cleane