2010 Aixtron AIX 2800 G4 HT

6" x 8 wafers

OEM Model Description

The AIXTRON AIX 2800 G4 HT (High-Temperature) is an advanced metal-organic chemical vapor deposition (MOCVD) system developed by AIXTRON SE. It is designed specifically for high-temperature processing and the epitaxial growth of compound semiconductor materials.

Using the G4 system, GaAs-based VCSEL structures, EELaser structures and pHEMT structures were processed with InGaAs active layers and AlGaAs DBRs.  As for group V precursor, only AsH3 was used.  PH3 is capable, but it was not connected.