AMAT Producer Chamber C Unit
AMAT Producer Chamber C Unit
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Description
Conduction: Used
Wafer Size: 300mm
INCLUDE:
HEATER*2 0040-81661
EDWARDS STP-F2203C TURBO PUMP P/N: PT50-0Z-006 *1
LOWER CHAMBER
UPPER CHAMBER
Spare parts:
0021-27883 SLIT DOOR ASSY Al, partial coated Y2O3
0200-04146-002 Liner Top Y2O3
Specifications
| Manufacturer | AMAT |
| Model | Producer Chamber C Unit |
| Condition | Used |
| Stock Number | BM3455 |