AMAT Producer Chamber C Unit

Conduction: Used

Wafer Size: 300mm

INCLUDE:

HEATER*2 0040-81661

EDWARDS STP-F2203C TURBO PUMP P/N: PT50-0Z-006 *1

LOWER CHAMBER

UPPER CHAMBER

Spare parts:

0021-27883 SLIT DOOR ASSY Al, partial coated Y2O3

0200-04146-002 Liner Top Y2O3