LAM 9600 Etch

Wafer size: 8 inch

Chamber positions: CH- etch chamber

Chiller #1: SMC HRZ008-L2-Y

Chiller #2: SMC HRZ008-L2-Y

CH Config:

• turbo:
• C/M:
• Bias RF matching unit:
• Bias RF generator: 32802
• DSQ generator: 4808
• TCP generator: 5964
• MFC #1:
• MFC #2:
• MFC #3:

Inventory:

Tote 1:

Manual set: 1

Keyboards: 4

USB hub: 1

MC exhaust flange: 1

Bimba cylinder: 1

Wafer holder: 1

APM stepper motor assembly: 1

K1 main contractor: 1

Heater jackets: 2

Mouse: 1

Bag of musc parts: 3

Tote 2:

Bomb site and DSQ paddle calib: 1

Locking ring and pendulum: 1

208 power cord for anafaze: 1

MC, coil, upper match: 1

Bracket part # 715-32962-1-1: 1

Lexan covers for MC and DSQ: 3

ESCs: 2

Box RF braid: 1

Hine indexer: 1