1996 Mattson Technology AST 2800
1996 Mattson Technology AST 2800
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Description
Description RTP
Wafer Size 200 mm
Fab Section Thin Film
Asset Description AST SUPER HEAT SYSTEM
Software Version DOS 2.0
CIM GEM
Process RTP
Handler System PRI ROBOT ATM307 1
Handler System PRI ALIGNER 1
Specifications
| Manufacturer | Mattson Technology |
| Model | AST 2800 |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM3477 |