Duna 700 SOE

Coater System (modernized version of SVG88)

1 x AIO DUNA 700 modernized version of SVG88 series coater/ developer track upgraded version with

PC.

The upgrade of the SVG88 to the DUNA 700 includes:

 NetTrack Recipe Management Software inside

 Dual Track

 NetTrack CPU board

 3 refurbished CYBOR photo resist pumps with controller

 Brushless motor and servo controller

 4” size conversion kit

 There is Windows XP PC 2pcs (develop/resist) Originally there was no PC.

Specification

 Wafer size: capable up to 6” wafer and set up to 6” wafer

 Wafer type: Silicon round wafer

 Wafer flow: left to right

 Power: 220/240V, Single Phase, 50/60Hz

 Rear of the cabinet facilities access

 Standard poly floors

 Teflon insulated mainframe wiring

 NetTrack CPU Board

o Direct interchangeable with SVG CPU

o Can store up to 99 programs

o Capable component exercise

 NetTrack Recipe Management

o Compatible to SVG86/88 Series Track system

o Unlimited recipe storage and secure on PC hard disk

o Real-time process alarm & event capturing and information display

o Network host recipe data automation

Module Specifications

Indexer Assembly

 Capacitance wafer sensor

 3/16” inch pitch (25 wafer cassette setup)

 Sliver Teflon Coated Platform

Hot Plate Oven Assembly

 Clear anodized 3 pin Hot Plate Oven Assembly (Temp. spec: Less than +/- 0.5C

 3-pin lift for wafer handling

 AIO enhanced Cast-In Heating element, 220V, 450W

 Watlow Controller with PID control

o Auto tuning +/- 0.1% calibration accuracy

o +/- 0.1C temperature uniformity

o Digital LED display

 Proximity or contact bake control

 Common stainless steel exhaust manifold assembly

 1/10 th read out RTD temperature probe

 50C to 250C temperature range

 HBO exhaust cover (special feature of DUNA 700 system)

Coat Module Assembly

 Programmable Pivoting moving dispense with 3 dispense lines and TOP EBR assy

 AIO Low Profile Catch Cup Assembly with build-in Bottom EBR

 Brushless spin motor and servo controller is included

 Pre-dispense cup with programmable pre-dispense up to 99 cycles

 Pivoting Z Axis Moving Dispense

 3/16”, 3/16”, 3/16” size dispense nozzle

 Digital Vacuum Switch

 Top and Bottom EBR

 Interlocked safety cover to stop process when removed

 Center collection 1 gallon drain jar with high level sensor to link to alarm panel

 Solvent Vapor Tip Bath

 Purge system for Dispense line

Positive Developer Module Assembly

 Programable Moving Dispense Assy

 Neslab CTD Cart is included

 Brush high spin motor is included

 Spray and stream and back wash nozzle

 Digital Vacuum Switch

 Interlocked safety cover to stop process when removed

 Direct drain to the customer drain line

ATS (Automatic transfer System) Assy