2001 Applied Materials 9500 xR 200 S Implanter

- Wheel type: 25 wafer disc Si coated

- Wafer tilt: -10 +10

- Source (i.e. Bernas or IHC): IHC

- Max implantation energy (in KeV): 5 - 160 KeV

- Max Extraction voltage (in KeV): 60 KeV

- Dual bellows extraction

- DI Heatexchanger Standard in tool

- Penulator screen front, CRT back.

- 68000 cpu, IBS CF card + backup

- Turbo: Leybold 1000C and 360C

- Cryo : CTI cryo pump

- HD FLOODGUN

- High torque flat orienter

- 5 trays in wafer loader

- Gasbox: PH3 SDS, AsH3 SDS, BF3 SDS, Ar

- Tool in cleanroom in production

- Hydrogen implant should be possible

- Full Host control

- 6"- Convertible to 8”

2001 Vintage