2003 NIKON NSR SF 100 Stepper

2003 NIKON NSR SF 100 Stepper 8"

- 6" reticle

- Resolution: 0.4um or less

- N.A.: 0.5

- Exposed light source: i-line (wavelength = 365nm)

- Exposure range: 25x33mm

- Alignment accuracy: 45nm or less (M + 3 sigma)

- Throughput: 120 wafers / hour (200mm wafer), 80 wafers / hour (300mm wafer, approximately)

- Reduction ratio: 1:4

2003 Vintage

In clean room, powered on, can be inspected