2015 TEL Trias e+

Tokyo Electron Ltd Traise+ 4-Chamber ASFD CVD System,

300mm,

w/ TRT-TMZZ triple loadport frontend,

TRT-LMZZ transfer chamber,

4ea process chambers assy# TEX-061:

Mfg 2015.

Includes: power distribution cabinet, 208V, 50/60Hz, 3ph, 276.8 FLA;

Trias TB-T-1212K-001 dual transformer,

DAS Styrax Duo abatement module