2011 HITACHI CG4100
2011 HITACHI CG4100
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Description
Tool Status Running Wafers
Wafer Size 300 mm
Fab Section Metrology
Asset Description Hitachi CG4100 tool
Software Version Standard
CIM SECS GEM
Process Metrology tool
Main System Main tool 1
Factory Interface FOUP 3
Options System Power Rack 1
Others Computer 1
Specifications
Manufacturer | HITACHI |
Model | CG4100 |
Year | 2011 |
Condition | Used |
Stock Number | BM3522 |