2007 TEL Trias
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Description
Tokyo Electron Ltd Trias 4-Chamber TiN Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-057096: Mfg 2007. (traps out for cleaning) Includes: power distribution cabinet; Trias TB TR2 T2 dual transformer
Condition
Used/See Description
Specifications
| Manufacturer | TEL |
| Model | Trias |
| Year | 2007 |
| Condition | Used |
| Stock Number | BM3530 |