2003 Advanced Engineering UV-951

UV Cure System

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 200mm

Current Equipment Status: Available

Available date: Currently Available

Audit to verify

======================= OEM Feature for reference =====================

UV curing system for reducing the adhesive strength of UV sensitive dicing tapes, effective UV wavelength 365nm, holds wafers up to 200mm, ozone free UV irradiation source, timer, UV-intensity meter, lamp hour and status indicator, 110v