1992 Novellus Concept One PECVD 8"

- 1 chamber

- Dielectric

- Nitride/TEOS

- Ver. 4.431 ECO 4.43

- Pump: 1ea, Ebara, A10S

- Load Type: Standard

Loadlock Chamber Configuration:

- Cool Station: 2 level

- Pressure Gauge: 223B-11117

- Throttle Valve: 253A-11010

- Throttle Valve Controller: MKS Type 652

Chamber Configuration:

- Pedestal 200mm

- Pressure Guage: Tylan 10Torr

- Throttle Valve: MDV-015

- Throttle Valve Controller: AC-2

- Isolation Valve: 14040-PE34-AB12/4

- RF Matcher: Trazar AMU2-1

- RF Generator:

    - HF:RFG 5500

   - LF: PDX1400, AE

Gas Box Configuration:

- Gas 1 : N2 5SLPM

- Gas 2 : N2 1SLPM

- Gas 3 : N2 2SLPM

- Gas 4 : N2 2SLPM

- Gas 5 : None

- Gas 6 : N2 20SLPM

- Gas 7 : NH3 10SLPM

- Gas 8 : N2 20SLPM

- Gas 9 : N2 20SLPM

- Gas 10 : N2 2SLPM

- Gas 11 : 20SLPM

1992 Vintage