2017 TEL Triase+

Tokyo Electron Ltd Triase+ 4-Chamber MU CVD System,

300mm,

w/ TRT-TMZZ triple loadport frontend,

TRT-LMZZ transfer chamber,

4ea process chambers assy# MU:

Mfg 2017.

Includes: 4ea electronics racks, each w/ Shimadzu vacuum controllers, MKN-502-3S2B02C-PS RF power supplies; power distribution cabinet, 208V, 50/60Hz, 3ph, 342.0 FLA; DAS Styrax Duo abatement module