1994 KLA Surfscan 6200 Particle Counter

8"

- 0.1 micron Defect Sensitivity (PSL STD)

- 0.02 ppm Haze Sensitivity

- 0.002 ppm Haze Resolution

- Accuracy within 1%

- XY coordinates

- Lock Down accessories

- Tencor approved blower assembly

- 30mW New Ar-Laser

- 208V/60HZ, 17A

- MS-DOS 6.22 ,Windows 3.1

- Software version: 2.1

1994 Vintage