1999 Gasonics PEP-4800DL

Concept Part Solutions, Inc., PEP-4800DL, 200mm

No loadports included.

Description HIO process

Year of Manufacture 1999

Tool Status Running Wafers

Wafer Size 200 mm Fab Section Etch 

Model PEP-4800DL (L), PEP-4800DL (R).

Vintage 1999

Asset Description GASONICS SODIUM REMOVAL

Software Version VER 4.0

CIM SECS

Process HIO

Main System MAIN TOOL 1

Factory Interface SMIF 2

Options System MW GENERATOR 2

Options System RF GENERATOR 2

EBARA DRY PUMPS 2

MAIN WALLBOX 1

CHILLER 2