2009 Nexx Systems STRATUS

NEXX STRATUS S300-FX ELECTROPLATING TOOL with ANCOSYS AUTOMATED ANALYSIS AND DOSING Unit

RFL02 SemiGEAR Reflow Tool

Wafer Size 300 mm

Fab Section R&D

Asset Description PLT03 NEXX STRATUS S300-FX ELECTROPLATING TOOL with ANCOSYS AUTOMATED ANALYSIS AND DOSING Unit

Software Version Standard

CIM SECS GEM

Process Plating metals Cu, Ni, Au, Sn, Ag

Main System ANCOSYS AUTOMATED ANALYSIS AND DOSING 1