2000 AMAT Ultima Centura

2 chms.

Wafer Size 200 mm

Fab Section Thin Film 

Asset Description CENTURA DCVD

Software Version B3734

CIM SEC, GEM

Process HDP USG

Main System Centura 5200 1

Options System FHDP chamber ultima 2

Ebara pump AAS70WN 3

ETO generator 3

EBARA PUMP AA20N 2

Missing/ Faulty Parts/ Accessories List

SMC Chiller 1

Cathode assembly 2

SMIF LPT (left) 1

RPS 2

Turbo pump 1