1996 AMAT P5000

Wafer size: 200mm

Fab section: thin film

Asset description: precision 5000 CVD system

Software version: E5.01C

CIM: SEC

Process: ILD

Handler system: loadlock 1

Options system: process chamber 3

Others: hot box 1

DLTR (share with bpteo-04) 1

Heat exchanger 1