1996 AMAT P5000
1996 AMAT P5000
Contact us for price
or
Call +353 (0) 87 192 1110
Description
Wafer size: 200mm
Fab section: thin film
Asset description: precision 5000 CVD system
Software version: E5.01C
CIM: SEC
Process: ILD
Handler system: loadlock 1
Options system: process chamber 3
Others: hot box 1
DLTR (share with bpteo-04) 1
Heat exchanger 1
Specifications
| Manufacturer | AMAT |
| Model | P5000 |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM3667 |